Advances in CMP/polishing technologies for the manufacture of electronic devices /

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CMP and polishing are the most precise processes used to finish the surfaces of mechanical and electronic or semiconductor components. This title presents the developments and technological innovations in the field - making R & D accessible to the wider engineering community.

Bibliographic Details
Call Number:Libro Electrónico
Other Authors: Doi, Toshiro (Editor), Marinescu, Ioan D. (Editor), Kurokawa, Syuhei (Editor)
Format: Electronic eBook
Language:Inglés
Published: Oxford : William Andrew, 2012.
Edition:1st ed.
Subjects:
Electrolytic polishing.
Grinding and polishing.
Polissage �electrolytique.
electropolishing.
Electrolytic polishing
Grinding and polishing
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