Ceramic thick films for MEMS and microdevices /

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The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical,...

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Bibliographic Details
Call Number:Libro Electrónico
Main Author: Dorey, Robert A.
Format: Electronic eBook
Language:Inglés
Published: Norwich, N.Y. : Oxford : William Andrew ; Elsevier Science [distributor], 2011.
Series:Micro & nano technologies.
Subjects:
Thick-film circuits > Design and construction.
Microelectromechanical systems > Design and construction.
Nanoelectronics.
Nano�electronique.
Microelectromechanical systems > Design and construction
Nanoelectronics
Online Access:Texto completo
Table of Contents:
  • Integration and applications
  • Routes to thick films
  • Thick film deposition techniques
  • Microstructure-property relationships
  • Pattering and structuring
  • Houston, we have a problem: Thick film troubleshooting
  • Recipes and techniques.

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