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SEM microcharacterization of semiconductors /

Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron b...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Holt, D. B., Joy, David C., 1943-
Formato: Electrónico eBook
Idioma:Inglés
Publicado: London [England] ; San Diego, CA : Academic, �1989.
Colección:Techniques of physics ; 12.
Temas:
Acceso en línea:Texto completo

MARC

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245 0 0 |a SEM microcharacterization of semiconductors /  |c edited by D.B. Holt, D.C. Joy. 
246 3 |a S.E.M. microcharacterization of semiconductors 
260 |a London [England] ;  |a San Diego, CA :  |b Academic,  |c �1989. 
300 |a 1 online resource (xiii, 452 pages) :  |b illustrations 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
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490 1 |a Techniques of physics ;  |v 12 
504 |a Includes bibliographical references and index. 
506 |3 Use copy  |f Restrictions unspecified  |2 star  |5 MiAaHDL 
533 |a Electronic reproduction.  |b [Place of publication not identified] :  |c HathiTrust Digital Library,  |d 2011.  |5 MiAaHDL 
538 |a Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.  |u http://purl.oclc.org/DLF/benchrepro0212  |5 MiAaHDL 
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588 0 |a Print version record. 
520 |a Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron beam instruments and the second deals with the interpretation of the information obtained in the main operating modes of a scanning electron microscope. 
650 0 |a Semiconductors. 
650 0 |a Scanning electron microscopes. 
650 2 |a Semiconductors  |0 (DNLM)D012666 
650 6 |a Semi-conducteurs.  |0 (CaQQLa)201-0318258 
650 6 |a Microscopes �electroniques �a balayage.  |0 (CaQQLa)201-0014916 
650 7 |a semiconductor.  |2 aat  |0 (CStmoGRI)aat300015117 
650 7 |a Scanning electron microscopes  |2 fast  |0 (OCoLC)fst01106478 
650 7 |a Semiconductors  |2 fast  |0 (OCoLC)fst01112198 
700 1 |a Holt, D. B. 
700 1 |a Joy, David C.,  |d 1943- 
776 0 8 |i Print version:  |t SEM microcharacterization of semiconductors.  |d London [England] ; San Diego, CA : Academic, �1989  |w (OCoLC)19355053 
830 0 |a Techniques of physics ;  |v 12. 
856 4 0 |u https://sciencedirect.uam.elogim.com/science/book/9780123538550  |z Texto completo