Chargement en cours…
Oxygen in silicon /
This volume reviews the latest understanding of the behavior and roles of oxygen in silicon, which will carry the field into the ULSI era from the experimental and theoretical points of view. The fourteen chapters, written by recognized authorities representing industrial and academic institutions,...
| Cote: | Libro Electrónico |
|---|---|
| Autres auteurs: | |
| Format: | Électronique eBook |
| Langue: | Inglés |
| Publié: |
Boston :
Academic Press, Inc.,
�1994.
|
| Collection: | Semiconductors and semimetals ;
v. 42. |
| Sujets: | |
| Accès en ligne: | Texto completo Texto completo |
Internet
Texto completoTexto completo