Laser microfabrication : thin film processes and lithography /
This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, ther...
Cote: | Libro Electrónico |
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Autres auteurs: | , |
Format: | Électronique eBook |
Langue: | Inglés |
Publié: |
Boston :
Academic Press,
�1989.
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Sujets: | |
Accès en ligne: | Texto completo |
Table des matières:
- Sources, optics, and laser microfabrications systems for direct writing and projection lithography / Y.S. Liu
- Laser-stimulated molecular processes on surfaces / T.J. Chuang
- Spectroscopy and photochemistry of gases, adsorbates, and liquids / M. Rothschild
- Photophysics and thermophysics of light absorption and energy transport in solids / C.I.H. Ashby and J.Y. Tsao
- Transport and kinetics / H.J. Zeigler, D.J. Ehrlich, and J.Y. Tsao
- Laser etching / John J. Ritsko
- Laser deposition : energetics and chemical kinetics / R.L. Jackson [and others]
- Laser deposition : experimental approaches / J. Haigh and M.R. Aylett
- Epitaxy / S.J.C. Irvine
- Doping and oxidation / Ian W. Boyd.