Laser microfabrication : thin film processes and lithography /

This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, ther...

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Détails bibliographiques
Cote:Libro Electrónico
Autres auteurs: Ehrlich, Daniel J., Tsao, Jeffrey Y.
Format: Électronique eBook
Langue:Inglés
Publié: Boston : Academic Press, �1989.
Sujets:
Lasers > Industrial applications.
Thin film devices > Design and construction.
Microlithography.
Microfabrication.
Lasers > Applications industrielles.
Microlithographie.
TECHNOLOGY & ENGINEERING > Lasers & Photonics.
Lasers > Industrial applications
Microfabrication
Microlithography
Thin film devices > Design and construction
D�unnschichttechnik
Laserbearbeitung
Oberfl�achenbehandlung
Laser
Photolithographie (Halbleitertechnologie)
Accès en ligne:Texto completo
Table des matières:
  • Sources, optics, and laser microfabrications systems for direct writing and projection lithography / Y.S. Liu
  • Laser-stimulated molecular processes on surfaces / T.J. Chuang
  • Spectroscopy and photochemistry of gases, adsorbates, and liquids / M. Rothschild
  • Photophysics and thermophysics of light absorption and energy transport in solids / C.I.H. Ashby and J.Y. Tsao
  • Transport and kinetics / H.J. Zeigler, D.J. Ehrlich, and J.Y. Tsao
  • Laser etching / John J. Ritsko
  • Laser deposition : energetics and chemical kinetics / R.L. Jackson [and others]
  • Laser deposition : experimental approaches / J. Haigh and M.R. Aylett
  • Epitaxy / S.J.C. Irvine
  • Doping and oxidation / Ian W. Boyd.

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