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Fundamental principles of engineering nanometrology /
The principles of engineering metrology applied to the micro- and nanoscale: essential reading for all scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. The establishment of common standards will be an essentia...
| Call Number: | Libro Electrónico |
|---|---|
| Main Author: | |
| Format: | Electronic eBook |
| Language: | Inglés |
| Published: |
Oxford : Amsterdam :
William Andrew ; Elsevier Science,
�2010.
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| Edition: | 1st ed. |
| Series: | Micro & nano technologies.
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| Subjects: | |
| Online Access: | Texto completo Texto completo |
Table of Contents:
- Introduction to metrology for micro- and nanotechnology; Some basics of measurement;� Precision measurement instrumentation
- some design principles; Length traceability using interferometry; Displacement measurement; Surface topography measurement instrumentation; Scanning probe and particle beam microscopy; Surface topography characterisation; Co-ordinate metrology; Mass and force measurement; References; Appendix A: SI units of measurement and their realisation at NPL; Appendix B: SI derived units.