MEMS : a practical guide to design, analysis, and applications /

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Does MEMS technology offer advantages to your company's products? Will miniature machines on a chip solve your application objectives for "smaller, better, cheaper, and faster?" If you are a product development engineer or manager, the decision to design a MEMS device implies having a...

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Bibliographic Details
Call Number:Libro Electrónico
Other Authors: Korvink, J. G. (Jan G.), Paul, Oliver
Format: Electronic eBook
Language:Inglés
Published: Norwich, NY : Heidelberg, Germany : W. Andrew Pub. ; Springer, �2006.
Subjects:
Microelectromechanical systems.
Micro-Electrical-Mechanical Systems
Microsyst�emes �electrom�ecaniques.
TECHNOLOGY & ENGINEERING > Mechanical.
Ing�enierie.
Microelectromechanical systems
MEMS
Online Access:Texto completo
Table of Contents:
  • Introduction
  • Microtransducer Operation
  • Material Properties: Measurement and Data
  • MEMS and MEMS Simulation
  • System-Level Simulation of Microsystems
  • Thermal Based Sensors
  • Photon Detectors
  • Free-Space Optical MEMS
  • Integrated Micro-Optics
  • Magnetic Microsensors
  • Mechanical Microsensors
  • Semiconductor-Based Chemical Microsensors
  • Microfluidics
  • Biomedical Microsystems
  • Microactuators
  • Micromachining Technology
  • Interface Circuitry and Microsystems
  • Index.

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