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Handbook of chemical vapor depostion [i.e. deposition] (CVD) : principles, technology, and applications /
Turn to this new second edition for an understanding of the latest advances in the chemical vapor deposition (CVD) process. CVD technology has recently grown at a rapid rate, and the number and scope of its applications and their impact on the market have increased considerably. The market is now es...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Norwich, N.Y. :
Noyes Publications/William Andrew Pub.,
�1999.
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| Edición: | 2nd ed. |
| Colección: | Materials science and process technology series.
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| Temas: | |
| Acceso en línea: | Texto completo |
Tabla de Contenidos:
- Introduction and General Considerations
- Fundamentals of Chemical Vapor Deposition
- The Chemistry of CVD
- Metallo-Organic CVD (MOCVD)
- CVD Processes and Equipment
- The CVD of Metals
- The CVD of the Allotropes of Carbon
- The CVD of Non-Metallic Elements
- The CVD of Ceramic Materials: Carbides
- The CVD of Ceramic Materials: Nitrides
- The CVD of Ceramic Materials: Oxides
- The CVD of Ceramic Materials: Borides, Silicides, III-V Compounds and II-VI Compounds (Chalcogenides)
- CVD in Electronic Applications: Semiconductors
- CVD in Electronic Applications: Conductors, Insulators, and Diffusion Barriers
- CVD in Optoelectronic and Ferroelectric Applications
- CVD in Optical Applications
- CVD in Wear- and Corrosion-Resistant Applications
- CVD in Cutting-Tool Applications
- CVD in Fiber, Powder, and Monolithic Applications
- Conversion Guide
- Appendix: Alternative Processes for Thin-Film Deposition and Surface Modification
- Index.