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Electron-beam-induced nanometer-scale deposition /
Advances in Imaging and Electron Physics merges two long-running serials-Advances in Electronics and Electron Physics and Advances in Optical and Electron Microscopy. This series features extended articles on the physics of electron devices (especially semiconductor devices), particle optics at high...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Amsterdam ; Boston :
Elsevier Academic Press,
�2006.
|
| Colección: | Advances in imaging and electron physics ;
v. 143. |
| Temas: | |
| Acceso en línea: | Texto completo Texto completo Texto completo |
Tabla de Contenidos:
- Introduction.
- Electron-beam-induced nanometer-scale deposition: a literature survey.
- The theory of EBID spatial resolution.
- The role of secondary electrons in EBID.
- Delocalization effects in EBID.