Electron-beam-induced nanometer-scale deposition /
Advances in Imaging and Electron Physics merges two long-running serials-Advances in Electronics and Electron Physics and Advances in Optical and Electron Microscopy. This series features extended articles on the physics of electron devices (especially semiconductor devices), particle optics at high...
Clasificación: | Libro Electrónico |
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Otros Autores: | , |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Amsterdam ; Boston :
Elsevier Academic Press,
�2006.
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Colección: | Advances in imaging and electron physics ;
v. 143. |
Temas: | |
Acceso en línea: | Texto completo Texto completo Texto completo |
Sumario: | Advances in Imaging and Electron Physics merges two long-running serials-Advances in Electronics and Electron Physics and Advances in Optical and Electron Microscopy. This series features extended articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithography, image science and digital image processing, electromagnetic wave propagation, electron microscopy, and the computing methods used in all these domains. |
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Descripción Física: | 1 online resource (xv, 247 pages) : illustrations |
Bibliografía: | Includes bibliographical references (pages 219-235) and index. |
ISBN: | 9780080465357 0080465358 0120147858 9780120147854 6610707480 9786610707485 1280707488 9781280707483 |