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Micro mechanical transducers : pressure sensors, accelerometers, and gyroscopes /
Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started se...
| Call Number: | Libro Electrónico |
|---|---|
| Main Author: | |
| Format: | Electronic eBook |
| Language: | Inglés |
| Published: |
Amsterdam ; New York :
Elsevier,
2000.
|
| Series: | Handbook of sensors and actuators ;
v. 8. |
| Subjects: | |
| Online Access: | Texto completo Texto completo |
Table of Contents:
- Preface. Chapter 1
- Introduction to micro mechanical transducers. Chapter 2
- Basic mechanics of beam and diaphragm structures. Chapter 3
- Air damping. Chapter 4
- Electrostatic driving and capacitive sensing. Chapter 5
- Piezoresistive sensing. Chapter 6
- Piezoresistive pressure transducers. Chapter 7
- Piezoresistive accelerometers. Chapter 8
- Capacitive pressure transducers and accelerometers. Chapter 9
- Resonant sensors and vibratory gyroscopes. Subject Index.