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Micro mechanical systems : principles and technology /
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution...
| Call Number: | Libro Electrónico |
|---|---|
| Other Authors: | , |
| Format: | Electronic eBook |
| Language: | Inglés |
| Published: |
Amsterdam ; New York :
Elsevier,
1998.
|
| Series: | Handbook of sensors and actuators ;
v. 6. |
| Subjects: | |
| Online Access: | Texto completo Texto completo Texto completo |