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Materials science in microelectronics /
The subject matter of thin-films which play a key role in microelectronics divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationsh...
| Call Number: | Libro Electrónico |
|---|---|
| Main Author: | |
| Format: | Electronic eBook |
| Language: | Inglés |
| Published: |
Amsterdam ; Boston :
Elsevier,
2005-
|
| Edition: | 2nd ed. |
| Subjects: | |
| Online Access: | Texto completo Texto completo |
Table of Contents:
- v. 1. The relationships between thin film processing and structure
- v. 2. The effects of structure on properties in thin films.