Analysis and design principles of MEMS devices /

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Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS dev...

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Bibliographic Details
Call Number:Libro Electrónico
Main Author: Bao, Min-Hang
Format: Electronic eBook
Language:Inglés
Published: Amsterdam ; Boston ; London : Elsevier, 2005.
Subjects:
Microelectromechanical systems.
Micro-Electrical-Mechanical Systems
Microsyst�emes �electrom�ecaniques.
TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.
TECHNOLOGY & ENGINEERING > Electronics > Digital.
Microelectromechanical systems
Online Access:Texto completo
Table of Contents:
  • Chapter 1. Introduction to MEMS devices
  • Chapter 2. Basic mechanics of beam and diaphragm structures
  • Chapter 3. Air Damping
  • Chapter 4. Electrostatic Actuation
  • Chapter 5. Capacitive Sensing and Effects of Electrical Excitation
  • Chapter 6. Piezoresistive Sensing.

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