Optical diagnostics for thin film processing /

This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diagnostics in these applications is that they are usually n...

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Détails bibliographiques
Cote:Libro Electrónico
Auteur principal: Herman, Irving P.
Format: Électronique eBook
Langue:Inglés
Publié: San Diego, CA : Academic Press, �1996.
Sujets:
Thin films > Surfaces.
Spectrum analysis > Industrial applications.
Couches minces > Surfaces.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
D�unne Schicht
Optische Eigenschaft
Spectroscopie > Applications industrielles.
Spectroscopie.
Thin films
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