Optical diagnostics for thin film processing /

This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diagnostics in these applications is that they are usually n...

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Bibliographic Details
Call Number:Libro Electrónico
Main Author: Herman, Irving P.
Format: Electronic eBook
Language:Inglés
Published: San Diego, CA : Academic Press, �1996.
Subjects:
Thin films > Surfaces.
Spectrum analysis > Industrial applications.
Couches minces > Surfaces.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
D�unne Schicht
Optische Eigenschaft
Spectroscopie > Applications industrielles.
Spectroscopie.
Thin films
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