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Characterization in silicon processing /
This volume is devoted to the consideration of the use use of surface, thin film and interface characterization tools in support of silicon-based semiconductor processing. The approach taken is to consider each of the types of films used in silicon devices individually in its own chapter and to disc...
| Cote: | Libro Electrónico |
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| Autres auteurs: | |
| Format: | Électronique eBook |
| Langue: | Inglés |
| Publié: |
Boston : Greenwich :
Butterworth-Heinemann ; Manning,
�1993.
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| Collection: | Materials characterization series.
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| Sujets: | |
| Accès en ligne: | Texto completo |