Semiconductor industrial hygiene handbook : monitoring, ventilation, equipment, and ergonomics /

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This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal...

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Bibliographic Details
Call Number:Libro Electrónico
Main Author: Williams, Michael E., 1949-
Other Authors: Baldwin, David G., Manz, Paul C.
Format: Electronic eBook
Language:Inglés
Published: Park Ridge, N.J., U.S.A. : Noyes Publications, �1995.
Series:Materials science and process technology series.
Subjects:
Semiconductor industry > Employees > Health and hygiene.
Industrial hygiene.
Semi-conducteurs > Industrie > Personnel > Sant�e et hygi�ene.
Industrial hygiene
Semiconductor industry > Employees > Health and hygiene
Handbook
handbooks.
Handbooks and manuals
Handbooks and manuals.
Guides et manuels.
Online Access:Texto completo
Table of Contents:
  • Introduction
  • Industrial Hygiene Monitoring
  • Industrial Hygiene Monitoring: Physical Agents
  • Ventilation
  • Personal Protective Equipment (PPE)
  • Indoor Air Quality (IAQ)
  • Ergonomics
  • Industrial Hygiene Recordkeeping
  • Plan Review
  • Appendix A: Silicon Ingot and Wafer Manufacturing
  • Appendix B: Silicon Device Manufacturing Introduction
  • Appendix C: III-V (GaAs)
  • Appendix D: III-V Device: Microwave IC
  • Appendix E: Ion Implanter Maintenance Safety Considerations
  • Appendix F: Bibliography
  • Glossary and Acronyms
  • Index.

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