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Semiconductor industrial hygiene handbook : monitoring, ventilation, equipment, and ergonomics /
This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal...
| Cote: | Libro Electrónico |
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| Auteur principal: | |
| Autres auteurs: | , |
| Format: | Électronique eBook |
| Langue: | Inglés |
| Publié: |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
�1995.
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| Collection: | Materials science and process technology series.
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| Sujets: | |
| Accès en ligne: | Texto completo |