APA (7th ed.) Citation

Helbert, J. N. (2001). Handbook of VLSI microlithography: Principles, technology, and applications (2nd ed.). Noyes Publications ; William Andrew Pub..

Chicago Style (17th ed.) Citation

Helbert, John N. Handbook of VLSI Microlithography: Principles, Technology, and Applications. 2nd ed. Park Ridge, N.J. : Norwich, N.Y.: Noyes Publications ; William Andrew Pub., 2001.

MLA (8th ed.) Citation

Helbert, John N. Handbook of VLSI Microlithography: Principles, Technology, and Applications. 2nd ed. Noyes Publications ; William Andrew Pub., 2001.