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Characterization in Silicon Processing /
This volume is devoted to the consideration of the use use of surface, thin film and interface characterization tools in support of silicon-based semiconductor processing. The approach taken is to consider each of the types of films used in silicon devices individually in its own chapter and to disc...
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| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Newnes,
2013.
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| Edición: | 1st edition. |
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| Acceso en línea: | Texto completo (Requiere registro previo con correo institucional) |