MEMS cost analysis : from laboratory to industry /

This volume demonstrates show cost analysis can be adapted to MEMS, taking into account the wide range of processes and equipment, the major differences with the established semiconductor industry, and the presence of both large-scale, product-orientated manufacturers and small- and medium-scale fou...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Lawes, Ronald A. (Autor)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: [Singapore] : Pan Stanford Publishing, [2014]
Temas:
Microelectromechanical systems > Costs.
Microelectromechanical systems industry > Costs.
Microsystèmes électromécaniques > Coût.
Microsystèmes électromécaniques > Industrie > Coût.
TECHNOLOGY & ENGINEERING > Mechanical.
Microelectromechanical systems
Microelectromechanical systems industry
Acceso en línea:Texto completo (Requiere registro previo con correo institucional)
Tabla de Contenidos:
  • 1. The world of MEMS
  • 2. Basic fabrication processes
  • 3. Surface micromachining
  • 4. High-aspect-ratio micromachining
  • 5. MEMS testing
  • 6. MEMS packaging
  • 7. Clean rooms, buildings and plant
  • 8. The MEMSCOST spreadsheet
  • 9. Product costs : accelerometers
  • 10. Product costs : microphones
  • 11. MEMS foundries
  • 12. Financial reporting and analysis
  • 13. Conclusions.

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