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Ferroelectric dielectrics integrated on silicon /

This book describes up-to-date technology applied to high-K materials for More Than Moore applications, i.e. microsystems applied to microelectronics core technologies. After detailing the basic thermodynamic theory applied to high-K dielectrics thin films including extrinsic effects, this book emph...

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Bibliographic Details
Call Number:Libro Electrónico
Other Authors: Defaÿ, Emmanuel
Format: Electronic eBook
Language:Inglés
Published: London : Hoboken, NJ : ISTE ; Wiley, 2011.
Subjects:
Online Access:Texto completo (Requiere registro previo con correo institucional)