Ferroelectric dielectrics integrated on silicon /
This book describes up-to-date technology applied to high-K materials for More Than Moore applications, i.e. microsystems applied to microelectronics core technologies. After detailing the basic thermodynamic theory applied to high-K dielectrics thin films including extrinsic effects, this book emph...
Call Number: | Libro Electrónico |
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Other Authors: | |
Format: | Electronic eBook |
Language: | Inglés |
Published: |
London : Hoboken, NJ :
ISTE ; Wiley,
2011.
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Subjects: | |
Online Access: | Texto completo (Requiere registro previo con correo institucional) |