APA (7th ed.) Citation

Wu, B., Kumar, A., Eynon, B. G., Naulleau, P., Richardson, M., La Fontaine, B., . . . Kamberian, H. (2009). Extreme ultraviolet lithography (First edition.). McGraw-Hill Education.

Chicago Style (17th ed.) Citation

Wu, Banqiu, et al. Extreme Ultraviolet Lithography. First edition. New York, N.Y.: McGraw-Hill Education, 2009.

MLA (8th ed.) Citation

Wu, Banqiu, et al. Extreme Ultraviolet Lithography. First edition. McGraw-Hill Education, 2009.