Cargando…
Optical physics for nanolithography /
This book provides an in-depth, self-contained introduction of partially coherent imaging theory for researchers and engineers working on optical lithography for semiconductor manufacturing, including those in the EDA industry. It is mathematically complete: the opening chapters discuss the essentia...
| Clasificación: | Libro Electrónico |
|---|---|
| Autores principales: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Bellingham, Washington (1000 20th St. Bellingham WA 98225-6705 USA) :
SPIE,
2018.
|
| Colección: | SPIE Press monograph ;
PM284. |
| Temas: | |
| Acceso en línea: | Texto completo |