APA (7th ed.) Citation

Yen, A., & Yu, S. (2018). Optical physics for nanolithography. SPIE.

Chicago Style (17th ed.) Citation

Yen, Anthony, and Shinn-Sheng Yu. Optical Physics for Nanolithography. Bellingham, Washington (1000 20th St. Bellingham WA 98225-6705 USA): SPIE, 2018.

MLA (8th ed.) Citation

Yen, Anthony, and Shinn-Sheng Yu. Optical Physics for Nanolithography. SPIE, 2018.

Warning: These citations may not always be 100% accurate.