NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore /

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The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processe...

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Bibliographic Details
Call Number:Libro Electrónico
Corporate Author: International Conference on Materials for Advanced Technologies Singapore
Other Authors: Khine, Lynn (Editor), Tsai, Julius M. (Editor)
Format: Electronic Conference Proceeding eBook
Language:Inglés
Published: Durnten-Zurich ; Enfield, NH : Trans Tech, ©2011.
©2011
Series:Advanced materials research ; v. 254.
Subjects:
Nanoelectromechanical systems > Congresses.
Microelectromechanical systems > Congresses.
Nanosystèmes électromécaniques > Congrès.
Microsystèmes électromécaniques > Congrès.
SCIENCE > Nanoscience.
TECHNOLOGY & ENGINEERING > Nanotechnology & MEMS.
Microelectromechanical systems
Nanoelectromechanical systems
NEMS/MEMS technology
Materials
Advanced technologies
ICMAT
Conference papers and proceedings
Online Access:Texto completo
Description
Summary:The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. A very useful guide to this highly specialized topic. Review from Book News Inc.: Papers from a summer 2011 symposium shed light on new devices, process innovations, and engineering applicati.
Physical Description:1 online resource (x, 229 pages) : illustrations (some color)
Bibliography:Includes bibliographical references and indexes.
ISBN:9783038136095
3038136093
9781621986850
1621986853
ISSN:1022-6680 ;

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