Substrate surface preparation handbook /
"Substrate Surface Preparation Handbook serves as a practical, one-stop reference, covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits. This hands-on resource offers you detailed guidan...
Call Number: | Libro Electrónico |
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Main Author: | |
Format: | Electronic eBook |
Language: | Inglés |
Published: |
Boston :
Artech House,
2012.
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Series: | Artech House applied photonics series.
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Subjects: | |
Online Access: | Texto completo |