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Substrate surface preparation handbook /
"Substrate Surface Preparation Handbook serves as a practical, one-stop reference, covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits. This hands-on resource offers you detailed guidan...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Boston :
Artech House,
2012.
|
| Colección: | Artech House applied photonics series.
|
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
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| 008 | 120118s2012 maua ob 001 0 eng d | ||
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| 049 | |a UAMI | ||
| 100 | 1 | |a Robertson, Max. | |
| 245 | 1 | 0 | |a Substrate surface preparation handbook / |c Max Robertson. |
| 260 | |a Boston : |b Artech House, |c 2012. | ||
| 300 | |a 1 online resource (195 pages) : |b illustrations. | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 347 | |a data file |2 rda | ||
| 490 | 1 | |a Artech House applied photonics series | |
| 504 | |a Includes bibliographical references and index. | ||
| 505 | 0 | |a Introduction -- Preparation : before the start -- Lapping -- Polishing -- Specific processes and materials -- Specialized techniques -- Surface finish -- Optics -- Semiconductor device Deconstruction -- Metallurgical Polishing and Microscopy -- Laboratory Setup -- Using Interferometry. | |
| 520 | |a "Substrate Surface Preparation Handbook serves as a practical, one-stop reference, covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits. This hands-on resource offers you detailed guidance in the entire substrate surface preparation process, from lapping and polishing ... to specialized techniques and surface finishing. Supported with over 125 illustrations, this unique book provides you with a complete understanding of important maintenance methods and the full range of equipment available in the field. You gain the know-how and confidence you need to produce desired results when processing a sample of new material, rather than wasting time and money on a trial and error approach. Moreover, this authoritative book presents in-depth discussions on key applications, such as optics production and semiconductor de-lamination and deconstruction."-- |c Unedited summary from book. | ||
| 590 | |a Knovel |b ACADEMIC - Electronics & Semiconductors | ||
| 650 | 0 | |a Optical materials |x Surfaces. | |
| 650 | 0 | |a Glass grinding and polishing. | |
| 650 | 6 | |a Matériaux optiques |x Surfaces. | |
| 650 | 6 | |a Verre |x Doucissage et polissage. | |
| 650 | 7 | |a Glass grinding and polishing |2 fast | |
| 650 | 7 | |a Optical materials |x Surfaces |2 fast | |
| 776 | 0 | 8 | |i Print version: |a Robertson, Max. |t Substrate surface preparation handbook. |d Norwood, MA : Artech House, ©2012 |w (DLC) 2011276683 |
| 830 | 0 | |a Artech House applied photonics series. | |
| 856 | 4 | 0 | |u https://appknovel.uam.elogim.com/kn/resources/kpSSPH000J/toc |z Texto completo |
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