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Advances in CMP/polishing technologies for the manufacture of electronic devices /
CMP and polishing are the most precise processes used to finish the surfaces of mechanical and electronic or semiconductor components. --P. 4 of cover.
| Cote: | Libro Electrónico |
|---|---|
| Autres auteurs: | , , |
| Format: | Électronique eBook |
| Langue: | Inglés |
| Publié: |
Oxford :
Elsevier,
2012.
|
| Édition: | 1st ed. |
| Sujets: | |
| Accès en ligne: | Texto completo |
| Résumé: | CMP and polishing are the most precise processes used to finish the surfaces of mechanical and electronic or semiconductor components. --P. 4 of cover. |
|---|---|
| Description matérielle: | 1 online resource (xii, 317 pages) : illustrations, color portraits |
| Bibliographie: | Includes bibliographical references and index. |
| ISBN: | 9781437778601 1437778607 |