Cita APA (7a ed.)

Levinson, H. J. (1999). Lithography process control. SPIE Optical Engineering Press.

Cita Chicago Style (17a ed.)

Levinson, Harry J. Lithography Process Control. Bellingham, Wash.: SPIE Optical Engineering Press, 1999.

Cita MLA (8a ed.)

Levinson, Harry J. Lithography Process Control. SPIE Optical Engineering Press, 1999.