Society of Photo-Optical Instrumentation Engineers & Bakshi, V. (2006). EUV sources for lithography. SPIE.
Style de citation Chicago (17e éd.)Society of Photo-Optical Instrumentation Engineers et Vivek Bakshi. EUV Sources for Lithography. Bellingham, Wash.: SPIE, 2006.
Style de citation MLA (8e éd.)Society of Photo-Optical Instrumentation Engineers et Vivek Bakshi. EUV Sources for Lithography. SPIE, 2006.
Attention : ces citations peuvent ne pas être correctes à 100%.