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Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /
An overview of the technology that describes the advantages provided by plasmas, plasma fundamentals, and a range of plasma processes relevant to the deposition and etching of thin films for microelectronics and other fields.
| Cote: | Libro Electrónico |
|---|---|
| Autres auteurs: | , , |
| Format: | Électronique eBook |
| Langue: | Inglés |
| Publié: |
Park Ridge, N.J. :
Noyes Publications,
©1990.
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| Collection: | Materials science and process technology series.
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| Sujets: | |
| Accès en ligne: | Texto completo |