Handbook of VLSI microlithography : principles, technology, and applications /

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This handbook gives readers a look at the technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and X-ray lithography. The book's main theme is the specia...

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Bibliographic Details
Call Number:Libro Electrónico
Other Authors: Helbert, John N.
Format: Electronic eBook
Language:Inglés
Published: Park Ridge, N.J. : Norwich, N.Y. : Noyes Publications ; William Andrew Pub., ©2001.
Edition:2nd ed.
Series:Materials science and process technology series. Electronic materials and process technology.
Subjects:
Integrated circuits > Very large scale integration.
Microlithography.
Circuits intégrés à très grande échelle.
Microlithographie.
TECHNOLOGY & ENGINEERING > Electronics > Circuits > General.
Handbook
Handbooks and manuals.
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Handbook of VLSI microlithography : principles, technology, and applications /
Published 1991
Texto completo
Electronic eBook
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Handbook of VLSI microlithography : principles, technology, and applications /
Published 2001
Texto completo
Electronic eBook
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