Fundamentals of microfabrication and nanotechnology. from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications / Volume III :

Détails bibliographiques
Cote:Libro Electrónico
Auteur principal: Madou, Marc J. (Auteur)
Format: Électronique eBook
Langue:Inglés
Publié: Boca Raton, Florida ; London, [England] ; New York : CRC Press, 2011.
Édition:Third edition.
Sujets:
Microelectromechanical systems.
Nanoelectromechanical systems.
Microfluidics.
Solid state physics.
Electronic books.
Accès en ligne:Texto completo
Description
Description matérielle:1 online resource (642 pages) : illustrations (some color), tables
Bibliographie:Includes bibliographical references at the end of each chapters.
ISBN:9781439895245 (e-book)

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