Ultra Clean Processing of Semiconductor Surfaces XIII.

Bibliographic Details
Call Number:Libro Electrónico
Main Author: Mertens, Paul W.
Other Authors: Meuris, Marc, Heyns, Marc
Format: Electronic eBook
Language:Inglés
Published: Zurich : Trans Tech Publications, 2016.
Series:Solid State Phenomena Vol. 255.
Subjects:
Semiconductors > Surfaces > Congresses.
Semiconductors > Congresses.
Semi-conducteurs > Surfaces > Congrès.
Semi-conducteurs > Congrès.
SCIENCE > Physics > Electricity.
SCIENCE > Physics > Electromagnetism.
Semiconductors.
Semiconductors > Surfaces.
Conference papers and proceedings.
Online Access:Texto completo
Description
Physical Description:1 online resource (395 pages)
Bibliography:Includes bibliographical references at the end of each chapters and index.
ISBN:9783035730845
3035730849

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