Spectroscopic ellipsometry : practical application to thin film characterization /
Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from subnanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced i...
Cote: | Libro Electrónico |
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Auteurs principaux: | Tompkins, Harland G. (Auteur), Hilfiker, James N. (Auteur) |
Format: | Électronique eBook |
Langue: | Inglés |
Publié: |
New York [New York] (222 East 46th Street, New York, NY 10017) :
Momentum Press,
2016.
|
Collection: | Materials characterization and analysis collection,
|
Sujets: | |
Accès en ligne: | Texto completo |
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