Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium /

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Collection of selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 21-24, 2014, Brussels, Belgium. The 71 papers are grouped as follows: Chapter 1: Cleaning for FEOL Applications, Chapter 2: Cleaning for FEOL Appl...

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Bibliographic Details
Call Number:Libro Electrónico
Corporate Author: International Symposium on Ultra Clean Processing of Semiconductor Surfaces Brussels, Belgium
Other Authors: Mertens, Paul (Editor), Meuris, Marc (Editor), Heyns, Marc (Editor)
Format: Electronic Conference Proceeding eBook
Language:Inglés
Published: Pfaffikon, Switzerland : TTP, 2014.
Series:Diffusion and defect data. Solid state phenomena ; v. 219.
Subjects:
Semiconductors > Congresses.
Semi-conducteurs > Congrès.
TECHNOLOGY & ENGINEERING > Mechanical.
Semiconductors.
Conference papers and proceedings.
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