International Symposium on Ultra Clean Processing of Semiconductor Surfaces Ghent, Belgium, Heyns, M., Mertens, P., & Meuris, M. (2013). Ultra clean processing of semiconductor surfaces XI: Selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium. Trans Tech Publications Ltd..
Cita Chicago Style (17a ed.)International Symposium on Ultra Clean Processing of Semiconductor Surfaces Ghent, Belgium, Marc Heyns, Paul Mertens, y Marc Meuris. Ultra Clean Processing of Semiconductor Surfaces XI: Selected, Peer Reviewed Papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17-19, 2012, Gent, Belgium. Durnten-Zurich, Switzerland: Trans Tech Publications Ltd., 2013.
Cita MLA (8a ed.)International Symposium on Ultra Clean Processing of Semiconductor Surfaces Ghent, Belgium, et al. Ultra Clean Processing of Semiconductor Surfaces XI: Selected, Peer Reviewed Papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17-19, 2012, Gent, Belgium. Trans Tech Publications Ltd., 2013.