Chargement en cours…
Ultra clean processing of semiconductor surfaces X : selected, peer reviewed papers from the 10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 20-22, 2010, Ostend, Belgium /
The International Symposium on Ultra-Clean Processing of Semiconductor Surfaces (UCPSS) is a bi-annual conference which has been organized by IMEC since 1992. The scope of the symposium includes all issues related to contamination, cleaning and surface preparation in mainstream large-scale Integrate...
| Cote: | Libro Electrónico |
|---|---|
| Collectivité auteur: | |
| Autres auteurs: | , , |
| Format: | Électronique Actes de congrès eBook |
| Langue: | Inglés |
| Publié: |
Durnten-Zurich, Switzerland :
TTP,
©2012.
|
| Collection: | Diffusion and defect data. Solid state phenomena ;
v. 187. |
| Sujets: | |
| Accès en ligne: | Texto completo |