Ultra clean processing of semiconductor surfaces X : selected, peer reviewed papers from the 10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 20-22, 2010, Ostend, Belgium /
The International Symposium on Ultra-Clean Processing of Semiconductor Surfaces (UCPSS) is a bi-annual conference which has been organized by IMEC since 1992. The scope of the symposium includes all issues related to contamination, cleaning and surface preparation in mainstream large-scale Integrate...
Cote: | Libro Electrónico |
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Collectivité auteur: | |
Autres auteurs: | , , |
Format: | Électronique Actes de congrès eBook |
Langue: | Inglés |
Publié: |
Durnten-Zurich, Switzerland :
TTP,
©2012.
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Collection: | Diffusion and defect data. Solid state phenomena ;
v. 187. |
Sujets: | |
Accès en ligne: | Texto completo |