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Ultra clean processing of semiconductor surfaces X : selected, peer reviewed papers from the 10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 20-22, 2010, Ostend, Belgium /

The International Symposium on Ultra-Clean Processing of Semiconductor Surfaces (UCPSS) is a bi-annual conference which has been organized by IMEC since 1992. The scope of the symposium includes all issues related to contamination, cleaning and surface preparation in mainstream large-scale Integrate...

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Détails bibliographiques
Cote:Libro Electrónico
Collectivité auteur: International Symposium on Ultra Clean Processing of Semiconductor Surfaces Ostend, Belgium
Autres auteurs: Mertens, Paul, Meuris, Marc, Heyns, Marc
Format: Électronique Actes de congrès eBook
Langue:Inglés
Publié: Durnten-Zurich, Switzerland : TTP, ©2012.
Collection:Diffusion and defect data. Solid state phenomena ; v. 187.
Sujets:
Accès en ligne:Texto completo