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Technology evolution for silicon nano-electronics : selected, peer reviewed papers from the proceedings of the International Symposium on Technology Evolution for Silicon Nano-Electronics 2010, June 3-5, 2010, Tokyo Institute of Technology, Tokyo, Japan /

Silicon ultra-large scale integrated circuits (ULSIs) are now faced with various physical limits to further scaling. Therefore, it is very important to establish the fundamental science and technology required to produce nano-scale complementary metal-oxide-semiconductor devices (Nano-CMOS) having h...

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Détails bibliographiques
Cote:Libro Electrónico
Collectivité auteur: International Symposium on Technology Evolution for Silicon Nano-Electronics Tokyo Institute of Technology
Autres auteurs: Miyazaki, Seiichi, Tabata, Hitoshi
Format: Électronique Actes de congrès eBook
Langue:Inglés
Publié: Stafa-Zurich, Switzerland ; Enfield, N.H. : Trans Tech Publications, ©2011.
Collection:Key engineering materials ; v. 470.
Sujets:
Accès en ligne:Texto completo