Nanofabrication using focused ion and electron beams : principles and applications /

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Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing t...

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Bibliographic Details
Call Number:Libro Electrónico
Other Authors: Utke, Ivo, Moshkalev, Stanislav, Russell, Phillip, 1955-
Format: Electronic eBook
Language:Inglés
Published: Oxford ; New York : Oxford University Press, 2011.
Series:Nanomanufacturing series ; v. 1.
Subjects:
Nanostructured materials.
Nanotechnology.
Electron beams > Industrial applications.
Ion bombardment > Industrial applications.
Nanomatériaux.
Faisceaux électroniques > Applications industrielles.
Bombardement ionique > Applications industrielles.
TECHNOLOGY & ENGINEERING > Material Science.
Nanostructures
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