Low energy ion assisted film growth /

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This book is an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. It is addressed to researchers, post-graduates and even engineers with little or no experience in the techniques of thin film deposition. It reviews the basic concepts related to the interaction of low en...

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Détails bibliographiques
Cote:Libro Electrónico
Auteur principal: González-Elipe, A. R.
Autres auteurs: Yubero, F., Sanz, J. M. (José María)
Format: Électronique eBook
Langue:Inglés
Publié: London : Singapore : Imperial College Press ; World Scientific [distributor], ©2003.
Sujets:
Thin films > Design and construction.
Thin films > Effect of radiation on.
Ion bombardment.
Couches minces > Effets du rayonnement sur.
Bombardement ionique.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
Ion bombardment
Thin films > Design and construction
Thin films > Effect of radiation on
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