APA (7th ed.) Citation

International Conference on Rapid Thermal Processing for Future Semiconductor Devices Ise-Shima, Mie, Japan, & Fukuda, H. (2003). Rapid thermal processing for future semiconductor devices: Proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), held at Ise-Shima, Mie, Japan, November 14-16, 2001. Elsevier.

Chicago Style (17th ed.) Citation

International Conference on Rapid Thermal Processing for Future Semiconductor Devices Ise-Shima, Mie, Japan, and Hisashi Fukuda. Rapid Thermal Processing for Future Semiconductor Devices: Proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), Held at Ise-Shima, Mie, Japan, November 14-16, 2001. Amsterdam ; London: Elsevier, 2003.

MLA (8th ed.) Citation

International Conference on Rapid Thermal Processing for Future Semiconductor Devices Ise-Shima, Mie, Japan, and Hisashi Fukuda. Rapid Thermal Processing for Future Semiconductor Devices: Proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), Held at Ise-Shima, Mie, Japan, November 14-16, 2001. Elsevier, 2003.