Beam Technologies for Integrated Processing.

Bibliographic Details
Call Number:Libro Electrónico
Main Author: Staff, National Research Council
Format: Electronic eBook
Language:Inglés
Published: Washington : National Academies Press, 1900.
Subjects:
Microelectronics industry.
Molecular beams > Industrial applications.
Microelectronics > Materials.
Plasma-enhanced chemical vapor deposition > Industrial applications.
Microélectronique > Industrie.
Faisceaux moléculaires > Applications industrielles.
Microélectronique > Matériaux.
Dépôt chimique en phase vapeur activé par plasma > Applications industrielles.
Microelectronics industry
Microelectronics > Materials
Molecular beams > Industrial applications
Plasma-enhanced chemical vapor deposition > Industrial applications
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