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Beam Technologies for Integrated Processing.

Detalles Bibliográficos
Clasificación:	Libro Electrónico
Autor principal:	Staff, National Research Council
Formato:	Electrónico eBook
Idioma:	Inglés
Publicado:	Washington : National Academies Press, 1900.
Temas:	Microelectronics industry. Molecular beams > Industrial applications. Microelectronics > Materials. Plasma-enhanced chemical vapor deposition > Industrial applications. Microélectronique > Industrie. Faisceaux moléculaires > Applications industrielles. Microélectronique > Matériaux. Dépôt chimique en phase vapeur activé par plasma > Applications industrielles. Microelectronics industry Microelectronics > Materials Molecular beams > Industrial applications Plasma-enhanced chemical vapor deposition > Industrial applications
Acceso en línea:	Texto completo

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