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Ultraviolet Laser Technology and Applications.
Ultraviolet Laser Technology and Applications is a hands-on reference text that identifies the main areas of UV laser technology; describes how each is applied; offers clearly illustrated examples of UV opticalsystems applications; and includes technical data on optics, lasers, materials, and system...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Burlington :
Elsevier Science,
1995.
|
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
| LEADER | 00000cam a2200000 4500 | ||
|---|---|---|---|
| 001 | EBOOKCENTRAL_ocn881571326 | ||
| 003 | OCoLC | ||
| 005 | 20240329122006.0 | ||
| 006 | m o d | ||
| 007 | cr |n||||||||| | ||
| 008 | 140623s1995 vtu o 000 0 eng d | ||
| 040 | |a EBLCP |b eng |e pn |c EBLCP |d OCLCQ |d DEBSZ |d OCLCQ |d MERUC |d OCLCQ |d UKAHL |d OCLCQ |d VLY |d OCLCO |d OCLCF |d OCLCO |d K6U |d OCLCQ |d OCLCO |d OCLCL | ||
| 020 | |a 9781483296517 | ||
| 020 | |a 1483296512 | ||
| 029 | 1 | |a DEBBG |b BV043610274 | |
| 029 | 1 | |a DEBSZ |b 431703647 | |
| 035 | |a (OCoLC)881571326 | ||
| 050 | 4 | |a TA1677 .U384 1995 | |
| 082 | 0 | 4 | |a 621.366 |
| 049 | |a UAMI | ||
| 100 | 1 | |a Elliott, David L. | |
| 245 | 1 | 0 | |a Ultraviolet Laser Technology and Applications. |
| 260 | |a Burlington : |b Elsevier Science, |c 1995. | ||
| 300 | |a 1 online resource (528 pages) | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 588 | 0 | |a Print version record. | |
| 505 | 0 | |a Cover image; Title page; Table of Contents; Copyright; Preface; Acknowledgments; Chapter 1: Ultraviolet Light; Publisher Summary; 1.1 Introduction; 1.2 The Ultraviolet Spectrum; 1.3 Historical Development of the Laser; 1.4 How a Laser Works; 1.5 UV Sources; 1.6 UV Lasers; 1.7 Inert Gas UV Lasers; 1.8 Metal Vapor Lasers; 1.9 Nitrogen Lasers; 1.10 Helium-Neon Lasers; 1.11 The Alexandrite Laser; Glossary of Terms; Chapter 2: Ablation; Publisher Summary; 2.1 The Ablation Phenomenon; 2.2 Background and History of Ablation; 2.3 Early Discoveries and Uses of Ablation; 2.4 Ablation Mechanisms. | |
| 505 | 8 | |a 2.5 Practical Characteristics of UV ReactionsGlossary of Terms; Chapter 3: The Excimer Laser; Publisher Summary; 3.1 Introduction; 3.2 History; 3.3 Theory of Operation; 3.4 The Gain Profile; 3.5 Excimer Laser Subsystems; 3.6 Laser Operation; 3.7 Laser Installation; 3.8 Laser Maintenance; 3.9 Gas Safety Guidelines; 3.10 UV Safety; Glossary of Terms; Chapter 4: UV Materials Research; Publisher Summary; 4.1 Introduction; 4.2 Laser Mass Spectral Analysis; 4.3 157-nm Fluorine Laser Processing; 4.4 Production of X-Rays with 248 nm Energy; 4.5 Excimer Laser-Induced Fluorescence; 4.6 Tunable UV Laser. | |
| 505 | 8 | |a 4.7 Laser Chemical Vapor Deposition4.8 Surface Analysis by Laser Ionization; 4.9 Photopolymer Research; 4.10 Laser Treatment of Organosilicons; 4.11 UV Laser Cleaning; 4.12 Cross-Sectioning Delicate Structures; Glossary of Terms; Chapter 5: UV Optics and Coatings; Publisher Summary; 5.1 Introduction; 5.2 UV Optical Requirements; 5.3 UV Optical Materials; 5.4 Radiation Damage; 5.5 Coating Manufacture; 5.6 UV Coatings and Reflection; 5.7 Extreme UV Coatings; 5.8 Single Layer Antireflection Coatings; 5.9 Multilayer Antireflection Coatings; 5.10 Dielectric Reflector Coatings. | |
| 505 | 8 | |a 5.11 Metal Reflector Coatings5.12 UV Coating Types by Application; 5.13 Coating Damage and Defects; 5.14 Coating versus Polarization; 5.15 Optical Fiber Beam Delivery; Glossary of Terms; Chapter 6: UV Laser Cleaning; Publisher Summary; 6.1 Introduction; 6.2 Technology Factors in Surface Contamination; 6.3 Size of Contaminants; 6.4 Contamination; 6.5 Integrated Circuit Cleaning; 6.6 Thin Film Heads; 6.7 Flat Panel Display Cleanings; 6.8 Compact Discs; 6.9 Printed Circuit Boards; 6.10 Cleaning Semiconductor Surfaces; 6.11 Laser Ablative Cleaning; 6.12 Debris Removal; Glossary of Terms. | |
| 505 | 8 | |a Chapter 7: Annealing and PlanarizingPublisher Summary; 7.1 Introduction; 7.2 Annealing Parameters; 7.3 Laser versus Electron Beam; 7.4 Pulsed versus Continuous Lasers; 7.5 Annealing Process Control; 7.6 Laser Planarization; 7.7 IC Topography Problems; 7.8 Resist Imaging on Topography; 7.9 Planarization with Polymer Coatings; 7.10 Nonlaser Thermal Planarization; 7.11 UV Laser Planarization; Glossary of Terms; Chapter 8: Deep-UV Microlithography; Publisher Summary; 8.1 Introduction; 8.2 Evolution of Deep-UV Lithography; 8.3 Deep-UV Technology: Resolution; 8.4 Resolution: The "k" parameter. | |
| 500 | |a 8.5 Exposing Wavelength. | ||
| 520 | |a Ultraviolet Laser Technology and Applications is a hands-on reference text that identifies the main areas of UV laser technology; describes how each is applied; offers clearly illustrated examples of UV opticalsystems applications; and includes technical data on optics, lasers, materials, and systems. This book is unique for its comprehensive, in-depth coverage. Each chapter deals with a different aspect of the subject, beginning with UV light itself; moving through the optics, sources, and systems; and concluding with detailed descriptions of applications in various fields. The text. | ||
| 590 | |a ProQuest Ebook Central |b Ebook Central Academic Complete | ||
| 650 | 0 | |a Lasers. | |
| 650 | 0 | |a Ultraviolet radiation. | |
| 650 | 6 | |a Lasers. | |
| 650 | 6 | |a Rayonnement ultraviolet. | |
| 650 | 7 | |a ultraviolet radiation. |2 aat | |
| 650 | 7 | |a lasers (optical instruments) |2 aat | |
| 650 | 7 | |a Lasers |2 fast | |
| 650 | 7 | |a Ultraviolet radiation |2 fast | |
| 758 | |i has work: |a Ultraviolet Laser Technology and Applications (Text) |1 https://id.oclc.org/worldcat/entity/E39PD38YH3BXrw7bXJGwPDpmJP |4 https://id.oclc.org/worldcat/ontology/hasWork | ||
| 776 | 0 | 8 | |i Print version: |a Elliott, David L. |t Ultraviolet Laser Technology and Applications. |d Burlington : Elsevier Science, ©1995 |z 9780122370700 |
| 856 | 4 | 0 | |u https://ebookcentral.uam.elogim.com/lib/uam-ebooks/detail.action?docID=1712397 |z Texto completo |
| 936 | |a BATCHLOAD | ||
| 938 | |a Askews and Holts Library Services |b ASKH |n AH26785809 | ||
| 938 | |a EBL - Ebook Library |b EBLB |n EBL1712397 | ||
| 994 | |a 92 |b IZTAP | ||