Ion Implantation and Activation - Volume 2.

Ion Implantation and Activation presents the derivation process of related models in a comprehensive step by step manner starting from the fundamental processes and moving up into the more advanced theories. Chapters in the book explain, in depth, various topics such as Pearson functions, LSS theory...

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Bibliographic Details
Call Number:Libro Electrónico
Main Author: Suzuki, Kunihiro
Format: Electronic eBook
Language:Inglés
Published: Sharjah : Bentham Science Publishers, 2013.
Series:Ion Implantation and Activation.
Subjects:
Ion implantation.
Ion accelerators.
Ions > Implantation.
Accélérateurs d'ions.
Ion accelerators
Ion implantation
Online Access:Texto completo
Description
Summary:Ion Implantation and Activation presents the derivation process of related models in a comprehensive step by step manner starting from the fundamental processes and moving up into the more advanced theories. Chapters in the book explain, in depth, various topics such as Pearson functions, LSS theory, Monte Carlo simulations, Edgeworth Polynomials and much more. This book provides advanced engineering and physics students and researchers with complete and coherent coverage of modern semiconductor process modeling.
Physical Description:1 online resource (171 pages)
Bibliography:Includes bibliographical references and index.
ISBN:9781608057900
1608057909

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