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Lithography /
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and...
| Call Number: | Libro Electrónico |
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| Other Authors: | |
| Format: | Electronic eBook |
| Language: | Inglés |
| Published: |
London :
Wiley,
2013.
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| Series: | ISTE.
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| Subjects: | |
| Online Access: | Texto completo |