Lithography /
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and...
Call Number: | Libro Electrónico |
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Other Authors: | |
Format: | Electronic eBook |
Language: | Inglés |
Published: |
London :
Wiley,
2013.
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Series: | ISTE.
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Subjects: | |
Online Access: | Texto completo |