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Lithography /

Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and...

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Bibliographic Details
Call Number:Libro Electrónico
Other Authors: Landis, Stefan
Format: Electronic eBook
Language:Inglés
Published: London : Wiley, 2013.
Series:ISTE.
Subjects:
Online Access:Texto completo