Substrate Surface Preparation Handbook.
Substrate Surface Preparation serves as a practical, one-stop reference, covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits. This hands-on resource offers you detailed guidance in the entir...
Cote: | Libro Electrónico |
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Auteur principal: | |
Format: | Électronique eBook |
Langue: | Inglés |
Publié: |
Norwood :
Artech House,
2011.
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Collection: | Artech House applied photonics series.
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Sujets: | |
Accès en ligne: | Texto completo |