Handbook of silicon based MEMS materials and technologies /

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A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. . Key topics covered include: .: . .; Silicon as MEMS material .; Material properties and measurement techniques .; Analytical method...

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Bibliographic Details
Call Number:Libro Electrónico
Other Authors: Lindroos, Veikko
Format: Electronic eBook
Language:Inglés
Published: Amsterdam ; Boston : William Andrew/Elsevier, 2010.
Edition:1st ed.
Series:Micro & nano technologies.
Subjects:
Microelectromechanical systems.
Microelectromechanical systems > Materials.
Silicon > Electric properties.
Micro-Electrical-Mechanical Systems
Microsystèmes électromécaniques.
Microsystèmes électromécaniques > Matériaux.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
Microelectromechanical systems
Microelectromechanical systems > Materials
Silicon > Electric properties
MEMS
Silicium
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